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  • ELA 4.5G-540C-465
Excimer Laser Annealing Equipment System
ELA 4.5G-540C-465
4.5代 LCD面板量产设备
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规格参数
Laser ModelTwinVYPER
Laser Wavelength308nm
Laser Stabilized Power(Max.)500W ( 1000mj )
Laser Repetition Rate(Max.)600Hz
Laser Energy Stability≤ 0.5%
Laser Pulse Duration29 ± 4ns
Line Beam Size465mm x 0.35mm
Stage Type4.5G Single Plane Air Bearing X , Y Stage with Z & R aixs

半导体领域专属设备,更多详细参数请与我们直接联系。