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  • ELA 6G-V-750
Excimer Laser Annealing Equipment System
ELA 6G-V-750
第六代柔性AMOLED面板量产设备
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规格参数
Laser ModelTwinVYPER
Laser Wavelength308nm
Laser Stabilized Power(Max.)1200W ( 2000mj )
Laser Repetition Rate(Max.)600Hz
Laser Energy Stability≤ 0.45%
Laser Pulse Duration24 ± 4ns
Line Beam Size750mm x 0.4mm
Stage Type6G Single Plane Air Bearing X , Y Stage with Z & R aixs

半导体领域专属设备,更多详细参数请与我们直接联系。